Enabling Technologies for MEMS and Nanodevices

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Author(s): Henry Baltes
Publisher: Wiley-VCH
Date : 2004
Pages : 439
Format : Rar'd PDF
OCR : Y
Quality :
Language :
ISBN : 352730746X
Download:
http://rapidshare.com/files/124839471/Enabling_Tech.rar | 12340 KB

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